1. Introduction

In cleanroom design and operation, temperature and humidity accuracy directly impact process stability, product yield, and energy cost. They are not set independently but paired to match each other.

2. Principle

If temperature and humidity accuracies are mismatched, energy use increases, control becomes harder, and batch variation grows. Industry practice has converged on common pairings to balance control difficulty and efficiency.

3. Temperature–Humidity Accuracy Correlation

Notes: The pairings apply to typical cleanrooms and constant T&RH systems, generally valid within 18–26 ℃; outside this range, evaluate per process and HVAC capability.

4. Typical Scenarios

±1%RH ↔ ±0.5 ℃: High-end semiconductors, lithography, aseptic filling—highly sensitive processes.

±2%RH ↔ ±1.0 ℃: Precision electronics, critical pharmaceutical areas.

±5%RH ↔ ±2.0 ℃: Most general electronics and pharmaceutical cleanrooms.

±10%RH ↔ ±2.0~±3.0 ℃: Electronics assembly, non-critical pharma areas, or comfort-oriented spaces.

5. Why It Matters

Energy Efficiency — Matching accuracies to need avoids over-design, reducing energy and CapEx.

Process Assurance — Stable T&RH conditions reduce batch variation and improve yield/consistency.

Compliance & Trust — Controls aligned with ISO 14644/GMP ease audits and build client confidence.

CLEEMS Value Proposition

We tailor T&RH accuracy pairings by process sensitivity and energy goals, delivering energy-efficient HVAC designs and verified handover for semiconductor, pharma, and new-energy clients.

Visit www.cleanroom-system.com to discuss the right balance of accuracy and energy for your project.